Publication:
Microelectromechanical device for lateral force calibration in the atomic force microscope: Lateral electrical nanobalance (2005)
Author(s): Cumpson PJ, Hedley J, Clifford CA
- Journal: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
- Volume: 23
- Issue: 5
- Pages: 1992-1997
- Publisher: American Institute of Physics
- Publication type: Article
- Bibliographic status: Published