Publication:

Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants, between 0.01 and 4 N/m (2004)

Author(s): Cumpson PJ, Hedley J, Clifford CA, Chen XY, Allen S

      • Date: 2-7 November 2004
      • Conference Name: Journal of Vacuum Science & Technology A: 50th AVS International Symposium
      • Volume: 22 (4)
      • Pages: 1444-1449
      • Publisher: American Institute of Physics
      • Publication type: Conference Proceedings (inc. abstract)
      • Bibliographic status: Published

      Keywords: FREQUENCY-RESPONSE FLUIDS PROBES ARRAY

      Staff

      Professor Peter Cumpson
      Science City Prof in MEMS

      Dr John Hedley
      Senior Lecturer