Publication:
Microelectromechanical system device for calibration of atomic force microscope cantilever spring constants, between 0.01 and 4 N/m (2004)
Author(s): Cumpson PJ, Hedley J, Clifford CA, Chen XY, Allen S
- Date: 2-7 November 2004
- Conference Name: Journal of Vacuum Science & Technology A: 50th AVS International Symposium
- Volume: 22 (4)
- Pages: 1444-1449
- Publisher: American Institute of Physics
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published
Keywords: FREQUENCY-RESPONSE
FLUIDS
PROBES
ARRAY