Accurate velocity measurements of AFM-cantilever vibrations by Doppler interferometry (2006)

Author(s): Portoles JF, Cumpson PJ, Hedley J, Allen S, Williams PM, Tendler SJB

      • Date: 01-03-2006
      • Journal: Journal of Experimental Nanoscience
      • Volume: 1
      • Issue: 1
      • Pages: 51-62
      • Publisher: Taylor & Francis Ltd.
      • Publication type: Article
      • Bibliographic status: Published

      Keywords: AFM calibration MEMS Doppler vibration traceability ATOMIC-FORCE MICROSCOPE CALIBRATION


      Professor Peter Cumpson
      Science City Prof in MEMS