Publication:
A study of SiGe/Si n-MOSFET processed and unprocessed channel layers using FIB and TEM methods (2005)
Author(s): Chang ACK, Norris DJ, Ross IM, Cullis AG, Olsen SH, O'Neill AG
- Date: 11-14 April 2005
- Conference Name: Proceedings of the 14th Conference on Microscopy of Semiconducting Materials (MSM)
- Volume: 107
- Pages: 111-114
- Publisher: Springer
- Publication type: Conference Proceedings (inc. abstract)
- Bibliographic status: Published