Publication:

Nanotechnology for MEMS Components (2001)

Author(s): Snowdon K, McNeil C, Lakey J

      • Date: 2001
      • Journal: MST News
      • Volume: 3
      • Issue: 1
      • Pages: 9-10
      • Publisher: VDI - VDE Innovation und Technik GmbH
      • Publication type: Article
      • Bibliographic status: Published