Microelectromechanical device for lateral force calibration in the atomic force microscope: Lateral electrical nanobalance (2005)

Author(s): Cumpson PJ, Hedley J, Clifford CA

      • Journal: Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
      • Volume: 23
      • Issue: 5
      • Pages: 1992-1997
      • Publisher: American Institute of Physics
      • Publication type: Article
      • Bibliographic status: Published

      Professor Peter Cumpson
      Science City Prof in MEMS

      Dr John Hedley
      Senior Lecturer