Scanning Electron Microscopy (SEM)

Compositional Information: None
Structural Information: Material contrast
Quantitative: n/a
Sensitivity: n/a
Spatial Resolution: Good (<100nm)
Depth Resolution: Excellent (>10nm)

NEXUS utilises a Hitachi TM3030 Scanning Electron Microscope (SEM). This is a simple bench-top SEM for rapid and easy imaging of surfaces and devices.

What can it do for me?

  • Rapid imaging of surfaces up to 30,000x magnification
  • Segmented back-scattered electron detector allows for some topographic information
  • Flexible sample analysis up to 70mm in diameter and 50mm in height
  • Two beam energies (5/15kV) allows for flexibility in terms of sample types
  • Equipped with Bruker Quantax 70 EDX system for elemental analysis

What are the typical applications?

  • Imaging of devices and materials
  • Imaging of failure points, stress fractures and cracks in materials
  • Metrology of particles, layers and features
  • Identification of features and areas for further analysis using high resolution SEM or HIM
  • Elemental distribution on a surface or feature using EDX

Are there any limitations?

  • Charging of insulating samples can cause unwanted effects in images
  • Limited in resolution as it is only a simple bench-top instrument